MESO Metrology SystemMESO Metrology System

MESO | Wavefront Metrology System for Interferometry Applications

Integration

Horizontal or Vertical

Optical Zoom

From 1,5’’ (38,1 mm) up to 6’’ (152 mm)

Testing Wavelength

Custom : 405 nm, 488 nm, 520 nm, 635 nm, 785 nm, 830 nm and/or 1064 nm

Resolution

680 x 500 phase points

Minimum Acquisition Time

27 us

Dimensions

63 x 30 x 45 cm

Overview

The Meso Metrology System is an easy at-wavelength instrument used for testing flat surfaces in any environment. (Testing diameter ranges from 1,5’’ to 6’.”) This unique new at-wavelength instrument allows several achromatism-free wavelength measurements. Additionally, it allows whole range characterization of optics without resolution loss.

Loaded with Innovation:

LIFT-enhanced high wavefront sensing resolution
POP-patent pending procedure for the testing of (thin) plane parallel optics
Insensitive to reflections from sample back surface

Key Features:

Insensitive to vibrations
At-design wavelength testing
Insensitive to reflections from sample back surface
Smart maintenance

Achromatism

Software: WAVESURF™ Easy-to-use Interface

In just a few clicks, operators and engineers in manufacturing environments can perform wavefront and surface characterization of flat optics and large lenses. With scripted testing procedures to guide users, using Wavesurf makes control easy, automated, and error-proof.

Detailed Specs for Mesa Metrology System
Optical Axis	4.25" (108 mm)
Dimensions	63 x 30 x 45 cm
Calibrated Range	405 nm to 1064 nm
Phase Point Resolution	680 x 500
Wavelength	Custom 405 nm, 488 nm, 520 nm, 635 nm, 785 nm, 830 nm, 1064 nm
Interface	USB 3.0
Optical Configuration	Double-pass
Mounting Configuration	horizontal or vertical
Test Beam Diameters	optical zoom from 1.5’’ (38.1 mm) up to 6’’ (152 mm)
Working Output Wavelengths	custom 405 nm, 488 nm, 520 nm, 635 nm, 785 nm, 830 nm, 1064 nm
Output Polarization	Optional Linear, Circular
Minimum Exposure Time	27 µS
Camera	4096 x 3000 pixels, 10 bits
System Software	high performance DellTM computer & 24’’ touchscreen, Windows 10, WaveSurfTM acquisition control & analysis software
Warranty	1 year system & laser standard, extendable
Dimension / Weight	63 x 30 x 45 cm / 25 kg
Vibration Isolation	Not necessary
Compressed Air	Not necessary
Sample reflectivity	1% - 100%, no attenuation required
Sample min. thickness	100 µm
RMS Wavefront Repeatability*	1 nm

* From a set of 36 measurements on a Ø4’’ diameter flat mirror, each of them averaged 16 times, a synthetic reference is defined by the mean of the 18 odd measurements. The RMS wavefront repeatability is then defined by the mean RMS difference plus 2x the standard deviation of the difference between the 18 even measurements and the synthetic reference.

MESO is the perfect testing tool for the control of:

• Parallel Optics
• Screens
• Filters, Dichroics
• Mirrors
• Beamsplitters
• Windows
• Substrates
• Corner cubes
• Crystals
• Rods, Disks
• Glass wafers
• Displays
• Machined surfaces
• Windshields
• Prisms
• Large lenses
• Optical systems
• Beam expanders

Software: WAVESURFTM Easy-to-use Interface

Achromatism

Meso DataSheet

MESO DATASHEET

WAVESURF supportive Software for MESO metrology system

Using scripted testing procedures that guide users though each step, in just a few clicks Wavesurf allows operators and engineers in manufacturing environments to perform surface characterizations of flat optics and large lenses.

Touchscreen interface control
Scripted testing procedures guide the user through all the steps
Automated control of up to 4 embedded wavelengths
Automated control of test diameter
Complete automated test report
ISO10110 standard compliance
Multiformat data export

Description

The Meso Metrology System is an easy at-wavelength instrument used for testing flat surfaces in any environment. (Testing diameter ranges from 1,5’’ to 6’.”)

MESO metrology system is a one-stop solution to many challenges in optical metrology. Shop floor measurements ensure quality control testing and in situ process control of your flat optics right next to the manufacturing line.

This unique new at-wavelength instrument allows several achromatism-free wavelength measurements. Additionally, it allows whole range characterization of optics without resolution loss.

MESO Metrology System is loaded with innovation:

First. LIFT-enhanced high wavefront sensing resolution
Second. POP-patent pending procedure for the testing of (thin) plane parallel optics
Third. Spot Tracker™ proprietary technology provides absolute measurement of tilt and wavefront

KEY FEATURES

Insensitive to vibrations
At-design wavelength testing
Insensitive to reflections from sample back surface

APPLICATIONS

Additionally, MESO is also the perfect testing tool for the control of:

Parallel Optics
Screens
Filters, dichroics
Mirrors
Beamsplitters
Windows
Substrates
Corner cubes
Crystals
Rods, Disks
Glass wafers
Displays
Machined surfaces
Windshields
Prisms
Large lenses
Optical systems
Beam expanders

KEY SPECS of MESO metrology system

Horizontal or vertical integration
Optical zoom from 1,5’’ (38,1mm) up to 6’’ (152mm)
Testing wavelength from 405nm to 1064nm
680 x 500 phase points resolution
27us minimum acquisition time

WAVESURF supportive Software used for MESO metrology system

Wavesurf allows operators and engineers in manufacturing environments to perform wavefront and surface characterization of flat optics and large lenses with just a few clicks. To that end, scripted testing procedures guide users through all the steps. Additionally, MESO Metrology System makes control easy, automated and error-proof.

KEY SPECS for MESO Metrology System

Touchscreen interface control
Scripted testing procedures guide the user through all the steps
Automated control of up to 4 embedded wavelengths
Automated control of test diameter
Complete automated test report
ISO10110 standard compliance
Multiformat data export

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