Payload (vertical / Horizontal )
400 kg / 140 kg
Linear travel range
± 50 mm / ± 200 mm
Angular travel range
± 20 °
Linear/angular resolution
0.1 µm / 1.5 µrad (0.5µrad)
Height middle position
360 mm / 640mm
Vacuum / Cryo / Cleanroom
HV (10-6) / No / ISO 5
