EUV Wavefront Sensor

HASO EUV I High Performance wavefront sensor for the 4 – 40 nm

Spectral Bandwidth

30 - 300 eV (4 - 40 nm)

Aperture - Resolution - Spatial Sampling

13 x 13 mm - 272 x 72 - ~ 180 μm"

Focus dynamic range

± 0.5 m to ∞ / 0.013

Focus dynamic range

± 0.5 m to ∞

Repeatability (rms)

< λ/200

Minimum readout time

~600 ms (2 MHz digitization)