Large Travel Precision Hexapod
Large Travel Precision Hexapod
SIRIUS Hexapod Dimensions Side
SIRIUS Hexapod Dimensions Top

SIRIUS | Large Travel Precision Hexapod

Payload (vertical / Horizontal )

200 kg / 80 kg

Linear travel range

± 150 mm

Angular travel range

± 20 °

Linear/angular resolution

5 µm / 10 µrad

Height middle position

750 mm

Vacuum / Cryo / Cleanroom

HV (10-6) / No / ISO 5